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Three-Dimensional Analysis of Electrode Structures
FIB-SEM
A three-dimensional reconstruction of electrodes is effectively investigated using the focused ion beam-secondary electron microscope (FIB/SEM), providing critical information on three-dimensional morphology. In last decade, FIB-SEM tomography has emerged as a valuable tool, providing 3D structures with a spatial resolution between 10 and 1000 nm.
Application of FIB-SEM
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